The MOSFET channel is the thin layer of mobile charge — electrons in an n-MOSFET, holes in a p-MOSFET — that forms right at the silicon surface under the Gate oxide when the gate voltage is large enough. The channel is the conducting path that connects source to drain; with no channel there is no path and the device is off.

How the channel forms (n-MOSFET)

Start with source, drain, and body all grounded, and slowly raise the gate voltage of an n-MOSFET. The substrate under the gate is p-type — its majority carriers are holes, with only a tiny number of electrons. The gate is one plate of a capacitor (see Gate oxide); the silicon surface is the other. As the gate goes positive, the field across the oxide acts on the surface in three stages:

  1. Accumulation pushed away → depletion. The positive gate first repels the positively charged holes away from the surface. What is left behind is the fixed, ionised negative acceptor atoms locked in the lattice — a depletion region, directly analogous to the one in a PN junction. There are still essentially no mobile carriers at the surface, so still no channel.
  2. Inversion. Keep raising the gate voltage. The field gets strong enough to attract electrons to the surface. The source and drain are heavily n+ doped, so they are reservoirs of electrons; electrons stream in from them and collect in a thin sheet right under the oxide. The surface, originally p-type, now behaves locally as n-type — it has been inverted. This electron sheet is the channel.
  3. Channel established. Once the channel exists it bridges the n+ source and n+ drain with a continuous conducting path, and current can flow.

The gate-to-source voltage at which the channel just appears is the Threshold voltage . How strongly the channel conducts is set by how far past threshold you are — the Overdrive voltage . More overdrive means more attracted charge means a thicker, more conductive channel.

The channel is not uniform once current flows

Apply a drain-to-source voltage and the channel stops being uniform along its length. The drain end sits at a higher potential than the source end, so the gate-to-channel voltage — the thing that actually holds charge in the channel — is smaller near the drain. The channel is therefore thinner at the drain end than at the source end. Push all the way up to and the drain-end channel thins to nothing: this is Channel pinch-off, and it is the boundary between the MOSFET triode region and the MOSFET saturation region. The whole behaviour of the MOSFET — voltage-controlled resistor below pinch-off, voltage-controlled current source above it — is just bookkeeping on the shape of this charge layer.